High Stability、High Precision、And High Productivity
Advanced Multi-joint Robotic Arm Design
High-speed Synthesis Function
No Travel Axis Required、Supports 4 Load Ports Per Row
Atmospheric robots
Atmospheric robots are mainly used in the front-end modules of semiconductor process equipment or process equipment. As used in EFEM or atmospheric transport in process modules such as diffusion equipment, cleaning equipment, detection equipment, CMP equipment, etc.
Our atmospheric robots have the characteristics of high precision and stability, and can provide customized services based on customers' real needs.
